APA Style

Campbell, Stephen A., Keehn- J. D.. (). The Science and Engineering of Microelectronic Fabrication. . : .

Chicago Style

Campbell, Stephen A., Keehn- J. D.. The Science and Engineering of Microelectronic Fabrication.. : , . .

MLA Style

Campbell, Stephen A., Keehn- J. D.. The Science and Engineering of Microelectronic Fabrication.. : , . .

Turabian Style

Campbell, Stephen A., Keehn- J. D.. The Science and Engineering of Microelectronic Fabrication.. : , . .