APA Style

Ruska, W. Scot, Von Grunebaum, G. E.. (). Microelectronic processing : an introduction to the manufacture or integrated circuits . : .

Chicago Style

Ruska, W. Scot, Von Grunebaum, G. E.. Microelectronic processing : an introduction to the manufacture or integrated circuits. : , . .

MLA Style

Ruska, W. Scot, Von Grunebaum, G. E.. Microelectronic processing : an introduction to the manufacture or integrated circuits. : , . .

Turabian Style

Ruska, W. Scot, Von Grunebaum, G. E.. Microelectronic processing : an introduction to the manufacture or integrated circuits. : , . .